The Dual Beam FEI Helios nanoLab 600 consists of two independent charged particle sources: 1- electrons, 2- gallium ions (Ga+). FEG-SEM with versatile characterization capabilities. At the time being, this microscope SEM provides highest resolution among all operational SEMs at DTU Nanolab, when operated for high resolution imaging (i.e. using low kV , in-lens detector, and in immersion mode).

This microscope is equipped with the following detectors BSE (backscatter electrons), electron backscatter diffraction (EBSD) (backscatter diffraction pattern), Energy-dispersive X-ray spectroscopy (EDS) (X-Rays), CDEM (secondary ions), etc. Gal+ focused ion beam (FIB) provides the possibility of characterization of microstruture by imaging and serial sectioning via sputtering. Since the microscope is equipped with a micro manipulator for high quality TEM sample preparation. The combination FIB sputtering capabilities, and 2-dimentional imaging and mapping (in case of EDS and EBSD) facilitates 3-dimentional characterization.